PECVD equipment features：

. Large-size, multi-layer plasma reactors and fast vacuum transfer system, reduce the cost of equipment,“Dual Vacuum” reactor design

.  Plasma system: fast plasma stabilization technology, frequency options of 13.56MHz and 40.68MHz. 

.  Customer's highest efficiency world record of HJT cell: 26.81% (ISFH)
   Customer’s highest efficiency world record of HBC cell: 27.3% (ISFH)
   Customer’s highest efficiency world record of perovskite/Si tandem cell: 34.6% (ESTI)