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Wet station


Texturing equipment features:


Compatible with wafer size of 182R-210R

.Customizable number of tanks, configurations and functions
 Isolation of exhaust, acid area and base area and reasonable distribution of tank robot avoid cross contamination High-efficient recirculating       cleaning system, the amount of tank recirculation is adjusted by frequency converter


.  Hot water cleaning function is designed to effectively prevent base crystallization in the air ducts



Detailed introduction
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Wet station

LOTOS TEST BENCH


 

LOTOS 2.0


Throughput: 600MW/year


 

 

LOTOS 3.0

Throughput: 1GW/year



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Address: 5th Floor, Building 4, No. 28 Yeting Road, Jiuting Town, Songjiang District, Shanghai
Tel : 021-66668888
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